A structural, optical and electrical comparison between physical vapour deposition and slot-die deposition of Al:ZnO (AZO)
نویسندگان
چکیده
Abstract Aluminium-doped zinc oxide (AZO) is a potential low-cost alternative to indium tin (ITO) for application in optoelectronic devices as transparent conducting thin film. Typically, AZO films are deposited using expensive, high vacuum equipment with energy cost and materials wastage. In this study, slot-die coating was used an inexpensive deposition form nanoparticle under ambient laboratory conditions. The were characterised structurally, optically electrically compared commercially obtained film fabricated physical vapour (PVD). Structural characterisation of the shows uniform coverage across substrate increased crystal quality following annealing Ar up 500 $$^{\circ }$$ ∘ C. optical properties exhibit wider band gap than PVD film, while density grain boundary defects between nanoparticles inhibits sheet conductivity. Graphical abstract
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ژورنال
عنوان ژورنال: MRS Advances
سال: 2023
ISSN: ['2731-5894', '2059-8521']
DOI: https://doi.org/10.1557/s43580-023-00554-w